VICTREX® PEEK™ offers a unique combination of high-end properties that greatly improve the semiconductor fabrication process.

Victrex has solid experience in the semi-conductor industry, working with processors, OEMs and Fabs. Much of the semiconductor industry is moving to larger wafer sizes and smaller chips with narrower line widths and/or feature sizes.  IC miniaturization demands increased performance of wafer processing and handling materials. In addition, harsher manufacturing environments, coupled with increased sensitivity to contamination, necessitate the use of high performance polymers such as VICTREX PEEK. VICTREX PEEK is an exceptionally clean and easily processed thermoplastic that can be formulated for specific properties such as wear resistance, electrostatic discharge (ESD) control and tight tolerance.

The VICTREX PEEK Advantage:

• High purity for more yield, less scrap, particle and contamination reduction
• Heat resistance for improved processing productivity (no cooling between cycles)
• Maintains modulus when exposed to high heat, providing higher processing performance and product performance
• Excellent mechanical properties for high impact resistance, faster equipment set-up and robust speed, product consistency
• High chemical resistance to combat most chemicals for part protection and long life
• Offers overall systems cost reduction and proven ROI

Available unfilled or filled depending on your application, VICTREX PEEK has distinct advantages over other engineering thermoplastics for wafer manufacturing, front-end processes, wafer inspection, and back-end processes. The polymer is a popular choice for wafer handling devices. It has been shown that using VICTREX PEEK wafer carriers can increase fab yield by up to 8% over carriers made from traditional materials like polypropylene.

Some key applications include CMP rings, wafer carriers and FOUPs, etch rings, gaskets, wafer chucks, back-end components, matrix trays, test sockets, fasteners and wands/grips.

For a copy of our Semiconductor literature, please click here.